JPH01104025U - - Google Patents
Info
- Publication number
- JPH01104025U JPH01104025U JP19764287U JP19764287U JPH01104025U JP H01104025 U JPH01104025 U JP H01104025U JP 19764287 U JP19764287 U JP 19764287U JP 19764287 U JP19764287 U JP 19764287U JP H01104025 U JPH01104025 U JP H01104025U
- Authority
- JP
- Japan
- Prior art keywords
- solution
- electrode
- silicon substrate
- small chamber
- etching device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19764287U JPH0727623Y2 (ja) | 1987-12-28 | 1987-12-28 | 電解エッチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19764287U JPH0727623Y2 (ja) | 1987-12-28 | 1987-12-28 | 電解エッチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01104025U true JPH01104025U (en]) | 1989-07-13 |
| JPH0727623Y2 JPH0727623Y2 (ja) | 1995-06-21 |
Family
ID=31488186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19764287U Expired - Lifetime JPH0727623Y2 (ja) | 1987-12-28 | 1987-12-28 | 電解エッチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0727623Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12278109B2 (en) | 2021-09-17 | 2025-04-15 | Kabushiki Kaisha Toshiba | Etching apparatus and etching method |
-
1987
- 1987-12-28 JP JP19764287U patent/JPH0727623Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12278109B2 (en) | 2021-09-17 | 2025-04-15 | Kabushiki Kaisha Toshiba | Etching apparatus and etching method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0727623Y2 (ja) | 1995-06-21 |